JPH0414879Y2 - - Google Patents

Info

Publication number
JPH0414879Y2
JPH0414879Y2 JP1984136037U JP13603784U JPH0414879Y2 JP H0414879 Y2 JPH0414879 Y2 JP H0414879Y2 JP 1984136037 U JP1984136037 U JP 1984136037U JP 13603784 U JP13603784 U JP 13603784U JP H0414879 Y2 JPH0414879 Y2 JP H0414879Y2
Authority
JP
Japan
Prior art keywords
heating element
planar heating
mounting base
frame
top plate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1984136037U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6152111U (en]
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1984136037U priority Critical patent/JPH0414879Y2/ja
Publication of JPS6152111U publication Critical patent/JPS6152111U/ja
Application granted granted Critical
Publication of JPH0414879Y2 publication Critical patent/JPH0414879Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Surface Heating Bodies (AREA)
  • Resistance Heating (AREA)
  • Electric Stoves And Ranges (AREA)
JP1984136037U 1984-09-07 1984-09-07 Expired JPH0414879Y2 (en])

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1984136037U JPH0414879Y2 (en]) 1984-09-07 1984-09-07

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1984136037U JPH0414879Y2 (en]) 1984-09-07 1984-09-07

Publications (2)

Publication Number Publication Date
JPS6152111U JPS6152111U (en]) 1986-04-08
JPH0414879Y2 true JPH0414879Y2 (en]) 1992-04-03

Family

ID=30694514

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1984136037U Expired JPH0414879Y2 (en]) 1984-09-07 1984-09-07

Country Status (1)

Country Link
JP (1) JPH0414879Y2 (en])

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2001084623A1 (fr) * 2000-05-01 2001-11-08 Ibiden Co., Ltd. Unite de plaque chauffante et dispositif de production et de controle de semi-conducteurs
JP2002025756A (ja) * 2000-07-04 2002-01-25 Ibiden Co Ltd 半導体製造・検査装置用ホットプレート

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52132438A (en) * 1976-04-23 1977-11-07 Toshiba Corp Exothermic device

Also Published As

Publication number Publication date
JPS6152111U (en]) 1986-04-08

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